Photosensitive composition and pattern-forming method using...

Details Photosensitive composition and pattern-forming method using... Photosensitive composition and pattern-forming method using...

2006-03-13

2010-10-05

Kelly, Cynthia H (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S922000

Reexamination Certificate

active

07807329

ABSTRACT:
A photosensitive composition comprises (A) a specific compound, which is excellent in sensitivity, resolution, and defocus latitude (DOF), and a pattern-forming method using the photosensitive composition is provided.

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