Photosensitive composition and pattern forming method using...

Details Photosensitive composition and pattern forming method using... Photosensitive composition and pattern forming method using...

2007-03-13

2007-03-13

Chu, John S. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S905000, C430S907000, C430S910000

Reexamination Certificate

active

10937270

ABSTRACT:
A photosensitive composition containing a compound capable of generating a specific acid having the plural number of sulfonic groups by irradiation with an actinic ray or a radiation and a pattern forming method using the same.

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