Photosensitive composition and acid generator

Details Photosensitive composition and acid generator Photosensitive composition and acid generator

2006-04-25

2006-04-25

Kelly, Cynthia H. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S325000, C430S326000, C430S905000, C430S907000, C430S910000, C430S914000, C430S921000, C430S922000, C430S923000, C430S927000, C522S031000, C549S013000, C549S014000, C549S029000, C549S059000, C549S060000, C549S078000, C568S018000, C568S074000, C568S075000, C568S077000

Reexamination Certificate

active

07033727

ABSTRACT:
A photosensitive composition of the present invention has excellent sensitivity and pattern profile, which comprises an acid generator having a specific structure.

REFERENCES:
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patent: 6326131 (2001-12-01), Schell et al.
patent: 2003/0077540 (2003-04-01), Kodama et al.
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patent: 2002-187780 (2001-07-01), None
patent: 2002-116546 (2002-04-01), None
European Search Report dated Feb. 11, 2004.

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