Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1986-10-21
1989-02-14
Bowers,, Jr.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430 5, 430142, 430312, 430326, 430329, G03F 726
Patent
active
048046140
ABSTRACT:
In a photolithographic process for fabricating microelectronic circuits, a contrast enhancing layer soluble in either water or developer that is selectively applied to a photoresist layer residing on a substrate.
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Bowers, Jr.
Burke William J.
The Aerospace Corporation
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