Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2000-11-01
2003-02-04
Baxter, Janet (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S322000, C430S905000, C430S910000, C549S274000, C526S285000
Reexamination Certificate
active
06514666
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to photoresist monomers, polymers derived therefrom, and photoresist compositions comprising the polymers. In particular, the present invention relates to dipropargyl malonic acid cyclic isopropylidene ester photoresist monomer, polymers and compositions suitable for photolithography processes employing KrF, ArF, EUV, and preferably 157 nm light sources like VUV.
2. Description of the Background Art
Recently, chemical amplification-type deep ultraviolet (DUV) photoresists have been investigated in order to achieve high sensitivity in minute image formation processes for preparing semiconductor devices. Such photoresists are prepared by blending a photoacid generator and a matrix resin polymer having an acid labile group.
In a photolithography process, exposure of a photoresist to light of a particular wavelength generates an acid from the photoacid generator that is present in the photoresist. This acid causes the main chain or the branched chain of the resin to decompose or become cross-linked. In addition, the acid removes the acid labile group and changes the polarity of the photoresist in the exposed region. This polarity change creates a solubility difference between the exposed portion and the unexposed portion in a developing solution, thereby allowing a pattern formation. The resolution of the pattern that is formed depends on the wavelength of the light source, i.e., in general a shorter wavelength allows formation of more minute patterns.
In general, a useful photoresist (hereinafter, abbreviated as “PR”) has a variety of desired characteristics, such as an excellent etching resistance, heat resistance and adhesiveness. In addition, a photoresist should be easily developable in a commercially readily available developing solution, such as 2.38% aqueous tetramethylammonium hydroxide (TMAH) solution. Furthermore, it should provide a good pattern formation using a 157 nm wavelength light source. However, it is difficult to synthesize a photoresist polymer that satisfies all of these desired characteristics. For example, polymers having a polyacrylate polymer backbone are readily available, but they have a poor etching resistance, difficult to develop, and difficult to obtain a good minute pattern due to its poor transmittance at wavelength of 157 nm.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide photoresist monomers having an excellent transmittance at 157 nm wavelength, etching resistance, adhesiveness and photosensitivity.
Another object of the present invention is to provide PR polymers derived from such photoresist monomers and methods for preparing the same.
Yet another object of the present invention is to provide photoresist compositions comprising such PR polymers.
Still another object of the present invention is to provide a semiconductor device produced by using the above described PR composition.
REFERENCES:
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patent: 5538666 (1996-07-01), Jin
patent: 5616669 (1997-04-01), Jin et al.
patent: 2002/0012879 (2002-01-01), Choi
patent: 2650588 (1991-02-01), None
Jin, Sung Ho; Choi, Hyun Nam; Choi, Sam Kwon “Cyclopolymerization of dipropargyl isopropylidene malonate and characterization of the product”, Journal of Polymer Science Part A: Polymer Chemistry 1993 32 (1) pp. 69-74.*
Yamamoto et al. “Cp*Ru(cod)Cl-catalyzed [2+2+2] Cycloaddition of 1,6-Heptadiynes with Allylic Ethers. A DEcisive Role of Coordinatrion to the Ether Oxygen Atom” (abstract), Journal of Organic Chemistry 1998 63 (26) pp. 9610-9611. CASREACT 130:124948.
Choi Jae Hak
Kim Myoung Soo
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