Photoresist management system

Details Photoresist management system Photoresist management system

2005-07-12

2008-11-18

Hess, Daniel A (Department: 2876)

Registers

Records

Conductive

C700S231000

Reexamination Certificate

active

07451935

ABSTRACT:
The present disclosure provides a system and method for managing photoresist fabrication. In one example, the system includes a holder that can removably receive a chemical container. The system includes chemical supply structure associated with the holder and adapted to be coupled to a processing module, wherein when a chemical container is removably disposed in the holder the chemical supply structure can carry a chemical away from the chemical container. The system includes an identification (ID) reader associated with the holder, wherein when a chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container. The system includes a control module coupled to the ID reader and adapted to be coupled to a processing module.

REFERENCES:
patent: 5980501 (1999-11-01), Gray
patent: 7256888 (2007-08-01), Staehr et al.
patent: 2002/0038392 (2002-03-01), De La Huerga
patent: 2003/0011476 (2003-01-01), Godfrey
patent: 2003/0183226 (2003-10-01), Brand et al.
patent: 2004/0100415 (2004-05-01), Veitch et al.
patent: 2005/0021165 (2005-01-01), Kuo
patent: 2005/0177274 (2005-08-01), O'Dougherty et al.

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