Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1994-12-16
1996-09-24
Lesmes, George F.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430326, 430906, 430910, G03C 173
Patent
active
055589782
ABSTRACT:
The invention relates to novel maleimide copolymers which, in addition to structural units derived from certain maleimide derivatives defined more precisely in the present patent application, comprises recurring structural units selected from the structural units of the formulae (Ia) and (Ib) ##STR1## where A is a direct single bond or a divalent group of the formula --O--;
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De Leo Christoph
Holzwarth Heinz
M unzel Norbert
Sch adeli Ulrich
Tinguely Eric
Lesmes George F.
OCG Microelectronic Materials Inc.
Simons William A.
Weiner Laura
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