Photoresist compositions

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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Details

430326, 430327, 430330, G03C 164

Patent

active

051242338

ABSTRACT:
Positive-working photoresist compositions containing

REFERENCES:
patent: 3752669 (1973-08-01), Abolafia
patent: 4624912 (1986-11-01), Zweifel et al.
patent: 4693961 (1987-09-01), Bauer
Encyclopedia of Chemical Technology 3rd edition, vol. 10 p. 268.
Derwent Abst. 83-828645/48.
Derwent Abst. 84-296088/48.

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