Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1988-06-03
1992-06-23
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430326, 430327, 430330, G03C 164
Patent
active
051242338
ABSTRACT:
Positive-working photoresist compositions containing
REFERENCES:
patent: 3752669 (1973-08-01), Abolafia
patent: 4624912 (1986-11-01), Zweifel et al.
patent: 4693961 (1987-09-01), Bauer
Encyclopedia of Chemical Technology 3rd edition, vol. 10 p. 268.
Derwent Abst. 83-828645/48.
Derwent Abst. 84-296088/48.
Losert Ewald
Meier Kurt
Bowers Jr. Charles L.
Chea Thorl
Ciba-Geigy Corporation
Hall Luther A. R.
Villamizar JoAnn
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