Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-04-18
2006-04-18
Barreca, Nicole (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S326000, C430S950000
Reexamination Certificate
active
07029821
ABSTRACT:
Methods are provides methods are provided to prepare photoresist and organic antireflective coating composition with a filter having a mean pore size of less than about 0.4 microns. Photoresist compositions and antireflective coatings produced by such methods can provide manufactured microelectronic devices that have significantly reduced defects. Photoresist and antireflective compositions obtainable by such methods also are provided.
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Carey Richard J.
Kaufman Michael J.
Trefonas, III Peter
Barreca Nicole
Corless Peter F.
Edwards & Angell LLP
Frickey Darryl P.
Rohm and Haas Electronic Materials LLC
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