Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2007-11-20
2010-12-07
Duda, Kathleen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S270100
Reexamination Certificate
active
07846644
ABSTRACT:
An atomic-layer-deposition process for forming a patterned thin film comprising providing a substrate, applying a photopatternable deposition inhibitor material to the substrate, wherein the deposition inhibitor material comprises an organosiloxane compound; and patterning the deposition inhibitor material. The thin film is substantially deposited only in the selected areas of the substrate not having the deposition inhibitor material.
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Cowdery-Corvan Peter J.
Freeman Diane C.
Irving Lyn M.
Levy David H.
Yang Cheng
Duda Kathleen
Eastman Kodak Company
KonKol Chris P.
Sullivan Caleen O
Tucker J. Lanny
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