Photolithographic production of microprotrusions for use as a sp

Details Photolithographic production of microprotrusions for use as a sp Photolithographic production of microprotrusions for use as a sp

1994-11-25

1998-10-13

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430330, 430396, G03F 700

Patent

active

058210334

ABSTRACT:
The present invention relates to a photolithographic method to produce multiple, electrically insulating microprotrusions on an electrically conducting substrate to produce and maintain substantially uniform space separation between the substrates which act as electrodes in a double layer capacitor or battery configuration. Preferably, the electrically insulating microprotrusions are an organic photocurable epoxide polymer, a photocurable acrylic polymer or combinations thereof.

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