Photolithographic apparatus

Details Photolithographic apparatus Photolithographic apparatus

1997-04-10

2000-05-23

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 67, 355 53, G03B 2772, G03B 2742

Patent

active

060671467

ABSTRACT:
Photolithographic apparatus (1) including an illumination unit (3). The illumination unit (3) comprises, in this order, a radiation source unit (11), a first optical system (5) and an optical waveguide (17). The apparatus (1) further includes a second optical system (7) and a mask table (9). The apparatus (1) is adapted in such a way that both the stepper mode and the scanner mode are selectable modi, and comprises means by which the illumination unit (11), when being operative, has a slit-shaped static illumination field with a width s which is variable between s.sub.min and s.sub.max while substantially maintaining energy within the static illumination field.

REFERENCES:
patent: 4474463 (1984-10-01), Heimer
patent: 4918583 (1990-04-01), Kudo et al.
patent: 5223693 (1993-06-01), Zumoto et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5473410 (1995-12-01), Nishi
patent: 5646715 (1997-07-01), Wangler
patent: 5675401 (1997-10-01), Wangler et al.
patent: 5715040 (1998-02-01), Iba
patent: 5854671 (1998-12-01), Nishi
Optics Guide 3, Melles Griot, 1985, Irvine CA, USA, pp. 238/239 XP002017468 "Cube Beamsplitters".
D.A. Markle, "The future and potential of optical scanning systems", Solid State Technology/Sep. 1984, pp. 159-166.

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