Photoimageable polyimide coating

Details Photoimageable polyimide coating Photoimageable polyimide coating

1995-05-26

1996-07-02

Chapman, Mark

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302701, 524600, 528310, 528312, 528353, G03C 1492

Patent

active

055321100

ABSTRACT:
A photoimageable polyimide coating which can be prepared from the polymeric condensation product of 6FDA, DMDE or MEDA, and a photosensitizing moiety. More particularly, the present invention relates to a photoimageable polyimide coating useful for microelectronic applications.

REFERENCES:
patent: 4786569 (1988-11-01), Rohde et al.
patent: 4912197 (1990-03-01), Hayes
patent: 4925912 (1990-05-01), Rohde et al.
patent: 4935320 (1990-06-01), Rohde et al.
patent: 5206091 (1993-04-01), Beuhler et al.

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