Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1994-07-01
1996-03-26
Chapman, Mark A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
524600, 528310, 528312, 528353, G03C 1492
Patent
active
055019412
ABSTRACT:
A photoimageable polyimide coating which can be prepared from the polymeric condensation product of 6FDA, DMDE or MEDA, and a photosensitizing moiety. More particularly, the present invention relates to a photoimageable polyimide coating useful for microelectronic applications.
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Amoco Corporation
Chapman Mark A.
Kanady Mary Jo
Oliver Wallace L.
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