Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1976-04-09
1977-10-04
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250398, G01M 2300
Patent
active
040526143
ABSTRACT:
An improved X-ray photoelectron spectrometer is disclosed, which includes circuit means to determine the surface potential of a sample, e.g., an insulator. The circuit means comprise an electron gun, whose potential is modulated at a preselected frequency above and below a selected potential with respect to the spectrometer common potential, e.g., ground. The beam of electrons is directed to the sample surface. The sample's surface potential is offset by an offset power supply with respect to the spectrometer common potential until the AC current which flows through the sample reaches a peak amplitude. A lock-in amplifier is included to measure the AC current in phase with the modulating frequency.
REFERENCES:
patent: 3535516 (1970-10-01), Munakata
Fletcher James C. Administrator of the National Aeronautics and Space
Grunthaner Frank J.
Lewis Blair F.
Anderson B. C.
Manning John R.
McCaul Paul F.
Mott Monte F.
Smith Alfred E.
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