Photoelectric microscope

Details Photoelectric microscope Photoelectric microscope

1976-06-14

1977-08-30

Corbin, John K.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

356167, 356172, G01B 904

Patent

active

040451410

ABSTRACT:
Description is made of improvements in a photoelectric microscope which is employed for the measurement of a very small distance. According to this invention, an optical system for making point-symmetric images is disposed in an optical path of an objective of a photoelectric microscope so as to form on an identical focal plane a pair of (two) images of a reference line (or mark) on a test piece which are in the relation of point symmetry to each other, and the distance between the pair of (two) images is measured, whereby the deviating distance of the reference line (or mark) on the test piece from the optic axis of the objective is evaluated. The distance between the pair of images is evaluated by gauging the time difference between two detection signals which are obtained by scanning the pair of images at equal speeds with photoelectric detectors.

REFERENCES:
patent: 3038369 (1962-06-01), Davis
patent: 3565532 (1971-02-01), Heitmann et al.
patent: 3592545 (1971-07-01), Paine
patent: 3876311 (1975-04-01), Sasayama

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