Photodetector array delineation method

Details Photodetector array delineation method Photodetector array delineation method

1976-09-07

1977-05-31

Lesmes, George F.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

357 55, 51310, 73355R, 156630, 428137, 428192, 428201, 428913, 156645, 156661, 156656, H01L 2714, H01L 3100, C23F 100, C23G 100

Patent

active

040273237

ABSTRACT:
A novel mask is used to contour the photodetector body and adhesive layer of a photodetector device on a substrate in which the mask apertures define an angle with the plane of the substrate. Air abrasion at that angle removes unwanted portions of the photodetector body and adhesive layer, leaving a contour desirable for subsequent interconnect metallization.

REFERENCES:
patent: 3545996 (1970-12-01), Duncan
patent: 3550260 (1970-12-01), Saltich et al.
patent: 3814993 (1974-06-01), Kennedy
patent: 3821777 (1974-06-01), James
patent: 3846822 (1974-11-01), Riley et al.

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