Photoactive adhesion promoter

Details Photoactive adhesion promoter Photoactive adhesion promoter

2008-11-24

2009-11-03

Walke, Amanda C. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Processing feature prior to imaging

C430S270100, C556S400000, C556S465000

Reexamination Certificate

active

07611828

ABSTRACT:
An adhesion promoter to help reduce semiconductor process effects, such as undesired line edge roughness, insufficient lithographical resolution, and limited depth of focus problems associated with the removal of a photoresist layer. A photoactive adhesion promoter (PAG) is described which helps reduce these and other undesired effects associated with the removal of photoresist in a semiconductor manufacturing process.

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