Photoacid generator compounds and compositions

Details Photoacid generator compounds and compositions Photoacid generator compounds and compositions

2008-10-21

2010-11-02

Walke, Amanda C. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S311000, C430S330000, C430S913000, C430S905000, C549S295000, C549S323000, C558S057000

Reexamination Certificate

active

07824839

ABSTRACT:
The invention provides various ionic and non-ionic photoacid generator compounds. Photoresist compositions that include the novel ionic and non-ionic photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.

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