Photo-thermal induced diffusion

Details Photo-thermal induced diffusion Photo-thermal induced diffusion

2006-06-20

2006-06-20

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S662000, C438S692000

Reexamination Certificate

active

07064063

ABSTRACT:
Formation of a mixed-material composition through diffusion using photo-thermal energy. The diffusion may be used to create electrically conductive traces. The diffusion may take place between material layers on one of a package substrate, semiconductor substrate, substrate for a printed circuit board (PCB), or other multilayered substrate. The photo-thermal energy may be supplied by various devices, for example a YAG laser device, CO2laser device, or other energy source.

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