Photo spinner apparatus and wafer carrier loading/unloading...

Details Photo spinner apparatus and wafer carrier loading/unloading... Photo spinner apparatus and wafer carrier loading/unloading...

2011-03-01

2011-03-01

Mathews, Alan A (Department: 2882)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C414S222010, C414S937000, C414S940000

Reexamination Certificate

active

07896563

ABSTRACT:
A photo spinner apparatus, including a spin coater for coating a plurality of wafers with photoresist, a bake device for hardening the photoresist coated by the spin coater, a developer for developing the photoresist hardened in the bake device, a transfer unit for transferring the plurality of wafers between the developer, the bake device, and the spin coater, and an indexer including a wafer carrier loader to vertically stack a plurality of wafer carriers into which the plurality of wafers transferred by the transfer unit are loaded.

REFERENCES:
patent: 6042324 (2000-03-01), Aggarwal et al.
patent: 6253118 (2001-06-01), Koyama
patent: 6937917 (2005-08-01), Akiyama et al.
patent: 6963789 (2005-11-01), Bun et al.
patent: 2005/0074313 (2005-04-01), Kang et al.
patent: 2005/0274430 (2005-12-01), Yokoi et al.
patent: 10-0572321 (2006-04-01), None

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