Photo-enhanced pyrolytic MOCVD growth of group II-VI materials

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156613, 156614, 156DIG72, 156DIG82, 156DIG92, 156DIG102, C30B 2510

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049043374

ABSTRACT:
A photo-enhanced pyrolytic technique for growing Group II-VI materials is described. Reactant vapors preferably low stability reactant vapors which form Group II-VI materials at relatively low temperatures are introduced into a reactor vessel. Disposed in the reactor vessel is a substrate which is heated to a growth temperature of generally less than about 400.degree. C. The surface of the substrate is illuminated by ultraviolet radiation and during pyrolytic decomposition of the vapors introduced to the growth vessel, the surface kinetic energy of migrating species on the surface of the substrate is increased by the radiation resulting in a reduction in defect levels in the material grown over the substrate.

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