Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2011-05-03
2011-05-03
Wu, Shean C (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S281100, C430S286100, C430S306000, C427S508000
Reexamination Certificate
active
07935472
ABSTRACT:
Provided is a new photo-curable resin composition which can be used in a photo nanoimprinting technology available for a photo nanoimprinting technology by which a substrate is processed with high accuracy. The photo-curable resin composition contains a photo-curable resin material essentially containing a (meth)acrylate, a reactive diluent, and a photo initiator. Preferably, the (meth)acrylate has a structure containing a benzene ring structure in its skeleton.
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Appl. Phys. Lett. 67 (21). Nov. 20, 1995 pp. 3114-3116.
Kaji Makoto
Ogino Masahiko
Sawabe Ken
Yori Hanako
Antonelli, Terry Stout & Kraus, LLP.
Hitachi Chemical Company Ltd.
Robinson Chanceity N
Wu Shean C
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