Photo-curable organopolysiloxane composition and a method for pr

Details Photo-curable organopolysiloxane composition and a method for pr Photo-curable organopolysiloxane composition and a method for pr

1996-03-18

1998-04-14

Hamilton, Cynthia

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302871, 4302881, 522 99, G03F 7075

Patent

active

057389764

ABSTRACT:
The composition comprises a (meth)acryloyloxyl group-containing organopolysiloxane having an average molecular weight of 3,000 to 100,000, in terms of polystyrene, and a photosensitizer. Such an organopolysiloxane having an average molecular weight of 3,000 or more is produced by subjecting (meth)acryloyloxypropyltrimethoxysilane and phenyltrimethoxysilane to cohydrolysis and subsequent condensation polymerization to produce a cohydrolysis-condensation polymerization product and then reacting and silylating the same product with a silylating agent such as hexamethyldisilazane. The composition containing such a high molecular weight (meth)acryloyloxyl-group-containing organopolysiloxane is excellent in sensitivity, resolution and storage stability and has little tackiness in uncured state after being coated, as well as being excellent in heat resistance after being cured. Thus, the composition is useful for photosensitive heat-resistant materials for use in semiconductor lithography and photosensitive heat-resistant materials for use in semiconductor passivation.

REFERENCES:
patent: 4201808 (1980-05-01), Cully et al.
patent: 4863833 (1989-09-01), Fukuyama et al.
patent: 4972005 (1990-11-01), Aoki et al.
patent: 5491203 (1996-02-01), Matsui et al.

Affiliated with

Also associated with

Rating

Photo-curable organopolysiloxane composition and a method for pr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photo-curable organopolysiloxane composition and a method for pr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photo-curable organopolysiloxane composition and a method for pr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-633549