4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Paul E. Colombo

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Apparatus and method for batch processing semiconductor...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for batch processing semiconductor...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Dual chamber cooling system with cryogenic and non-cryogenic...

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Integrated phase separator for ultra high vacuum system

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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MBE deposition method employing effusion cell having a unibody c

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized
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Profile ID: LFUS-PAI-P-516117

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