Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-08-02
2005-08-02
Le, Thao P. (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S030000, C438S144000, C438S028000
Reexamination Certificate
active
06924233
ABSTRACT:
Methods of coating a semiconductor device with phosphor particles are disclosed. In the methods, a bath is provided which contains suspended particles of a first phosphor material and suspended particles of a second phosphor material. The particles of the first phosphor material have a mean particle size in the range from about 1 micron to about 6 microns, and the particles of the second phosphor material have a mean particle size in the range from about 12 microns to about 25 microns, wherein the particle size distribution of the phosphor material in the bath is bimodal. The semiconductor device is disposed in the bath containing the suspended particles, and a first biasing voltage is applied between an anode in electrical contact with the bath and the p side to hold the anode at a positive voltage with respect to the p side. A second biasing voltage is applied between the p side and the n side. In particular embodiments, the method results in a substantially conformal coating of the phosphor particles being deposited on at least one surface of the semiconductor structure.
REFERENCES:
patent: 5813753 (1998-09-01), Vriens et al.
patent: 5998925 (1999-12-01), Shimizu et al.
patent: 6218774 (2001-04-01), Pope
patent: 6576488 (2003-06-01), Collins et al.
Ahmad Azlida
Chua Janet Bee Yin
Menkara Hisham
Summers Christopher J.
Agilent Technologie,s Inc.
Le Thao P.
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