Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1990-10-23
1992-09-15
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430311, 430314, 526251, G03F 900
Patent
active
051477416
ABSTRACT:
Phenyl-endcapped depolymerizable polymers are disclosed. The phenyl endcap eliminates the reactive terminal vinyl group resulting in increased depolymerization threshold temperatures and reduced residue after depolymerization. A multilevel metal lift-off process using the phenyl-endcapped polymers is disclosed. Additionally, the polymers are improved ceramic glass binder resins.
REFERENCES:
patent: 4456675 (1984-06-01), Anderson, Jr. et al.
patent: 4519872 (1985-05-01), Anderson, Jr. et al.
patent: 4539222 (1985-09-01), Anderson, Jr. et al.
patent: 4987211 (1991-01-01), Araps et al.
Araps Constance J.
Casey Jon A.
Divakaruni Renuka S.
Kandetzke Steven M.
Lotsko Catherine A.
Blecker Ira David
Chapman Mark A.
International Business Machines - Corporation
McCamish Marion E.
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