Phase-shifted gratings by selective image reversal of photoresis

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

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430323, 430326, 430329, 430394, 430328, G03C 516

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active

048852317

ABSTRACT:
Image reversal is controlled to occur in lithographically defined regions of a positive photoresist. In that way, selective reversal of a simple holographic grating is achieved to obtain 180-degree phase shifts within lighographically defined regions of the grating. Such a phase-shifted grating is useful, for example, to provide distributed feedback in a semiconductor laser designed for single-longitudinal-mode operation.

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Koyama et al., "1.5 .mu.m Phase Adjusted Active Distributed Reflecter Laser . . . ", Electronic Letters, vol. 20, pp. 391-392, May 1984.
Utaka et al., ".lambda./4-Shifted InGaAsP/InP DFB Lasers . . . ", Electronic Letters, vol. 20, Nov. 1984, pp. 1008-1009.
H. A. Haus et al., "Antisymmetric Taper of Distributed Feedback Lasers", IEEE J. Quantum Electron., QE-12, pp. 532-539, Sep. 1976.
K. Utaka et al., "Analysis of Quarter-Wave-Shifted DFB Lasers", Electronic Letters, vol. 20, pp. 326-327, Apr. 12, 1984.
K. Sekartedjo et al., "1.5 .mu.m Phase-Shifted DFB Lasers for Single-Mode Operation", Electronic Letters, vol. 20, pp. 80-81, Jan. 19, 1984.

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