Phase plate, in particular for an electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S3960ML, C850S009000

Reexamination Certificate

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07977633

ABSTRACT:
The invention concerns a phase plate, in particular for an electron microscope, which is disposed in an electron beam path (4), comprises at least one thin film (8, 8a-h), which thin film is at least partially permeable to electron beams, wherein the thin film (8, 8a-h) comprises electrically conductive material, is connected to a predeterminable electrical voltage (12, 12a-e) and is equipped with at least one through-hole (9, 9a-c).

REFERENCES:
patent: 5814815 (1998-09-01), Matsumoto et al.
patent: 7737412 (2010-06-01), Jin et al.
patent: 7741602 (2010-06-01), Benner et al.
patent: 7902506 (2011-03-01), Schroder et al.
patent: 1845551 (2007-10-01), None
patent: 1959475 (2008-08-01), None
Kuniaki Nagayama et al., “Development of phase plates for electron microscopes and their biological application,” Eur Biophys J (2008) 37:345-358, XP-019586216.

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