Phase plate for electron microscope and method for...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S306000

Reexamination Certificate

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07851757

ABSTRACT:
A phase plate for an electron microscope in which a portion of a magnetic thin-wire ring or a magnetic thin-wire rod spans an opening of a support member having the opening, the magnetic thin-wire ring or magnetic thin-wire rod generates a vector potential, and a phase difference is formed between electron beams that pass through left and right sides of a spanning portion of the magnetic thin-wire ring or the magnetic thin-wire rod. The phase plate prevents the electron beam loss more effectively, can be applied at an accelerating voltage within a wide rage from a low voltage to a high voltage, causes no difficulties in production, has good utility, and makes it possible to obtain a high-contrast image.

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International Search Report mailed Feb. 13, 2007 for International Application No. PCT/JP2006/321910.

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