Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1982-07-06
1984-11-06
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, G01B 902
Patent
active
044809166
ABSTRACT:
An interferometer for measuring optical surfaces which is capable of very high sensitivity. A HeNe laser light is converted into a circular polarized beam, spatially filtered and collimated. The light beam is passed through a photoelastic modulator for modulating the relative phase of the two polarization states of the optical field of the beam. The beam is then passed through a ROCHON prism which splits the beam into two orthogonally polarized components. One beam is reflected off the optical surface that is being measured and is recombined with the undeviated beam. The resulting irradiance distribution oscillates in the modulation frequency and the phase of the oscillation is dependent upon the optical path difference between the two beams. The detected interference signal is processed to extract the phase information.
REFERENCES:
patent: 3043182 (1962-07-01), Saunders
patent: 3767307 (1973-10-01), Bowker
patent: 3823604 (1974-07-01), Burch et al.
patent: 4188122 (1980-02-01), Massie et al.
patent: 4353650 (1982-10-01), Sommargren
Drain et al., "Displacement and Vibration Measurements by Laser Interferory", Proc. SPIE, vol. 136, pp. 52-57, 1977.
Bareket Noah
Metheny Wayne W.
Beers R. F.
Koren Matthew W.
Phillips T. M.
St. Amand J. M.
The United States of America as represented by the Secretary of
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