Phase grating and method of producing phase grating

Details Phase grating and method of producing phase grating Phase grating and method of producing phase grating

1996-04-08

1998-07-28

Dzierzynski, Paul M.

Optical: systems and elements

Diffraction

From grating

359566, 359569, 359900, 430 1, 430 2, G02B 518, G02B 2744, G03H 104

Patent

active

057869316

ABSTRACT:
The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.

REFERENCES:
patent: 4360586 (1982-11-01), Flanders et al.
patent: 4708437 (1987-11-01), Kraus
patent: 4828356 (1989-05-01), Hobrock et al.
patent: 4846552 (1989-07-01), Veldkamp et al.
patent: 5021649 (1991-06-01), Nishimura et al.
patent: 5245471 (1993-09-01), Iwatsuka et al.
patent: 5377044 (1994-12-01), Tomono et al.

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