Phase control of megasonic RF generator for optimum operation

Details Phase control of megasonic RF generator for optimum operation Phase control of megasonic RF generator for optimum operation

2006-04-25

2006-04-25

Lindsay, Jr., Walter L. (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C134S001000, C134S902000, C134S001200

Reexamination Certificate

active

07033845

ABSTRACT:
A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

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