Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1996-12-17
1998-09-29
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
H01J 3726
Patent
active
058148159
ABSTRACT:
An electrostatic potential in a vacuum in the vicinity of a focused electron beam of a direct wave formed on an optical axis of a back focal plane of an objective lens used in an electron microscope can be externally controlled. Therefore, the electrostatic potential is controlled by supplying an electric potential to a ring-shaped electrode from the outside. The outer sides of the electrode are interposed between both of insulators and conductors so as to shield the electrostatic potential against the outer side of a ring, whereby a phase shift is supplied only to an electron beam that passes through the inside of the ring. A phase-contrast electron microscope can be realized which includes a phase plate corresponding to an electron beam, which is capable of observing a phase object with contrast.
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Abstract of JP 60-7048, 14 Jan. 1985, Hitachi Seisakusho K.K., application no. 58-112718 filed 24 Jun. 1983.
Matsumoto Takao
Osakabe Nobuyuki
Tonomura Akira
Berman Jack I.
Hitachi , Ltd.
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