Phase-compensating vibration cancellation system for scanning el

Details Phase-compensating vibration cancellation system for scanning el Phase-compensating vibration cancellation system for scanning el

1990-08-13

1991-09-17

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250306, 250307, H01J 3728

Patent

active

050497456

ABSTRACT:
A system for adjusting the scanning pattern of an electron beam in a scanning electron microscope to decrease image sensitivity to vibrations. In the system, a seismometer is connected to sense displacement velocity caused by vibrations, an integrator is provided for integrating signals from the seisometer, and a phase compensation system is provided for operating upon the integrated signals to provide phase compensated signals that are substantialy 180 degrees out of phase with the sensed vibrations. The phase-compensated signals are used for adjusting the normal scanning pattern of the electron beam microscope to reduce the effects of the sensed vibrations on images provided by the microscope.

REFERENCES:
patent: 4948971 (1990-08-01), Vogen et al.

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