Permanent magnet magnetic circuit and magnetron plasma processin

Electricity: magnetically operated switches – magnets – and electr – Magnets and electromagnets – Magnet structure or material

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Details

335306, 20429816, 205 89, H01F 702, C23C 1400

Patent

active

053878930

ABSTRACT:
A permanent magnet magnetic circuit comprises a main magnet block having a pair of opposite outer surfaces. A pair of main magnetic poles of opposite polarities are disposed on the respective outer surfaces of the main magnet block. The main magnet block is provided with a channel defined between the pair of outer surfaces and the channel has a pair of inner surfaces corresponding to the respective outer surfaces of the main magnet block. The main magnet block is also provided with a pair of oppositely polarized compensating magnetic poles arranged on the respective inner surfaces for controlling any vector of the magnetic field directed from one of the main magnetic pole to the other main magnetic pole. A pair of adjusting magnet blocks are arranged on the respective inner surfaces to adjust the magnetic field directed from one of the main magnetic poles to the other magnetic pole.

REFERENCES:
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patent: 4180450 (1979-12-01), Morrison
patent: 4282083 (1981-08-01), Kertesz
patent: 4461688 (1984-07-01), Morrison
patent: 4614930 (1986-09-01), Hickey et al.
patent: 4672346 (1987-06-01), Miyamoto et al.
patent: 4810986 (1989-03-01), Leupold
patent: 4842707 (1989-07-01), Kinoshita
patent: 4964968 (1990-10-01), Arita
patent: 5289152 (1994-02-01), Oguriyama

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