Performance-enhancing two-sided MEMS anchor design for...

Details Performance-enhancing two-sided MEMS anchor design for... Performance-enhancing two-sided MEMS anchor design for...

2011-01-04

2011-01-04

Tran, Tan N (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S254000, C257SE29324

Reexamination Certificate

active

07863698

ABSTRACT:
An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

REFERENCES:
patent: 7104129 (2006-09-01), Nasiri et al.
patent: 7430909 (2008-10-01), Adams et al.
patent: 7478557 (2009-01-01), Geen

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