Pellicle for a lithographic lens

Details Pellicle for a lithographic lens Pellicle for a lithographic lens

2005-06-14

2005-06-14

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S067000, C355S077000

Reexamination Certificate

active

06906777

ABSTRACT:
A method and apparatus for preventing contamination in a lithographic apparatus including a projection system, including providing the lithographic apparatus including the projection system for imaging an irradiated portion of a mask onto a target portion of a substrate and placing a pellicle over a surface of the projection system to inhibit contamination of the surface.

REFERENCES:
patent: 5696623 (1997-12-01), Fujie et al.
patent: 6731378 (2004-05-01), Hibbs
patent: 2004/0091796 (2004-05-01), Nagata

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