Pedestal with self retaining sealing ring for semiconductor devi

Details Pedestal with self retaining sealing ring for semiconductor devi Pedestal with self retaining sealing ring for semiconductor devi

1997-11-04

1999-03-23

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118500, 118728, C23F 102

Patent

active

058854045

ABSTRACT:
A pedestal for a semiconductor device etching system includes a pedestal body having a circumferential recess. The recess includes a cutaway area extending radially inwardly therefrom. The pedestal further includes a sealing ring configured to mate with the pedestal body recess. The sealing ring includes a radially inwardly-extending projection that resides within the cutaway area of the recess. Because the sealing ring projection fits within and is retained by the cutaway area of the recess, the sealing ring remains in place upon removal of the mounted wafer even if it adheres somewhat to the wafer.

REFERENCES:
patent: 5492566 (1996-02-01), Sumnitsch
patent: 5569350 (1996-10-01), Osada et al.

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