Pedestal for flat panel display applications

Details Pedestal for flat panel display applications Pedestal for flat panel display applications

2005-08-02

2005-08-02

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C118S724000, C118S725000, C118S050100, C118S728000, C392S416000, C392S418000

Reexamination Certificate

active

06924462

ABSTRACT:
An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.

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