Metal treatment – Compositions – Heat treating
Patent
1979-04-05
1980-11-18
Rutledge, L. Dewayne
Metal treatment
Compositions
Heat treating
148175, 148187, 219121L, 250492A, 357 91, H01L 21268, H01L 2126
Patent
active
042343585
ABSTRACT:
A technique isdescribed for removing defects and disorder from crystalline layers and the epitaxial regrowth of such layers. The technique involves depositing short term bursts of energy over a limited spatial region of a material thereby annealing the otherwise damaged material and causing it to epitaxially regrow. Subsequent to the short term energy deposition, similar processing is sequentially effected on adjoining and overlapping regions such that a pattern is ultimately "written". This pattern forms a continuous region of essentially single crystal material.
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Celler George K.
Kimerling Lionel C.
Leamy Harry J.
Poate John M.
Rozgonyi George A.
Bell Telephone Laboratories Incorporated
Dworetsky Samuel H.
Roy Upendra
Rutledge L. Dewayne
Western Electric Company Inc.
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