Computer-aided design and analysis of circuits and semiconductor – Integrated circuit design processing – Layout editor
Reexamination Certificate
2011-03-01
2011-03-01
Do, Thuan (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Integrated circuit design processing
Layout editor
C716S104000, C716S126000, C716S132000
Reexamination Certificate
active
07900185
ABSTRACT:
A pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus and a charged beam photolithography apparatus which enable to maintain normality of the charged beam photolithography apparatus are provided. The pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus is a pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus which irradiates a charged beam on a target sample to write a desired pattern. Layout information and a pattern writing conditions which is prepared in advance are input to the pattern writing circuit, and processing result data of the pattern writing circuit output as a result of the inputting is collected. The collected processing result data of the pattern writing circuit is compared with correct data. The charged beam photolithography apparatus has means which realizes the pattern writing circuit self-diagnosis method.
REFERENCES:
patent: 7485879 (2009-02-01), Sunaoshi et al.
patent: 10-284392 (1998-10-01), None
U.S. Appl. No. 12/725,676, filed Mar. 17, 2010, Yashima.
Handa Yujin
Kimura Hayato
Matsukawa Takuya
Tsuchiya Seiichi
Wake Seiji
Do Thuan
NuFlare Technology, Inc.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
LandOfFree
Pattern writing circuit self-diagnosis method for charged... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pattern writing circuit self-diagnosis method for charged..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pattern writing circuit self-diagnosis method for charged... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2734588