Pattern inspection method and apparatus using electron beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

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Details

C250S311000, C250S559270, C250S559440, C250S559450

Reexamination Certificate

active

06940069

ABSTRACT:
A pattern inspection method which irradiates a charged particle beam onto a surface of a specimen on which a pattern is formed, simultaneously detecting with plural sensors secondary particles emanated from the surface of the specimen by the irradiation, adding signals outputted from each sensor of the plural sensors which simultaneously detected the secondary particles, obtaining an image of the surface of the specimen on which the pattern is formed from the added signals and processing the image to detect a defect of the pattern.

REFERENCES:
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 2000-188310 (2000-07-01), None
patent: 2000-252330 (2000-09-01), None

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