Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-05-23
2006-05-23
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S492300
Reexamination Certificate
active
07049589
ABSTRACT:
The present invention may include a pattern inspection method of extracting a pattern edge shape from an image obtained by a scanning microscope and inspecting the pattern. A control section and a computer of the scanning microscope process the intensity distribution of reflected electrons or secondary electrons, find the distribution of gate lengths in a single gate from data about edge positions, estimate the transistor performance by assuming a finally fabricated transistor to be a parallel connection of a plurality of transistors having various gate lengths, and determine the pattern quality and grade based on an estimated result. In this manner, it is possible to highly, accurately and quickly estimate an effect of edge roughness on the device performance and highly accurately and efficiently inspect patterns in accordance with device specifications.
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Fukuda Hiroshi
Kawada Hiroki
Tsuchiya Ryuta
Yamaguchi Atsuko
Yoneda Shozo
A. Marquez, Esq. Juan Carlos
Fernandez Kalimah
Fisher Esq. Stanley P.
Hitachi High-Technologies Corporation
Reed Smith LLP
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