Pattern forming method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156657, 1566591, 427 431, 427 541, B44C 122, B05D 306

Patent

active

047159294

ABSTRACT:
Method of forming any film pattern on an arbitrary substrate, more particularly, a pattern forming method which comprises selectively forming a film on an arbitrary substrate, by use of chemical vapor reaction, and further, a method of forming the pattern of an organic film by selectively removing the organic film at a lower layer, using the pattern of the Langmuir-Blodgett's film or chemical adsorption film containing Si as a mask.

REFERENCES:
patent: 3779806 (1973-12-01), Gipstein et al.
patent: 3825466 (1974-07-01), Martin
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4539061 (1985-09-01), Sagiv

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