Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1986-05-05
1987-09-01
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430 22, 430323, 430329, 430394, G03C 500, G03F 900
Patent
active
046908803
ABSTRACT:
A method of forming a pattern on a surface of a workpiece. The workpiece surface is coated with photoresist. Part of the coated workpiece surface is exposed and developed to form an alignment mark. An unexposed portion of the photoresist coated workpiece surface is then exposed, developed and etched.
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Masaki Yuichi
Morimoto Kenji
Suzuki Hideyuki
Terada Katsunori
Canon Kabushiki Kaisha
Kittle John E.
Ryan Patrick J.
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