Pattern checking apparatus

Details Pattern checking apparatus Pattern checking apparatus

1984-02-27

1986-12-09

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

356237, 356394, 382 34, G06K 900

Patent

active

046285318

ABSTRACT:
A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.

REFERENCES:
patent: 3887762 (1975-06-01), Uno et al.
patent: 3905045 (1975-09-01), Nickel
patent: 4200861 (1980-04-01), Hubach et al.
patent: 4309691 (1982-01-01), Castleman
patent: 4345312 (1982-08-01), Yasuye et al.
patent: 4352125 (1982-09-01), Guth
Ejiri et al., "A Process for Detecting Defects in Complicated Patterns", 1973.
Adam Osborne, An Introduction to Microcomputers, 1980.

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