Pattern area ratio measuring apparatus

Details Pattern area ratio measuring apparatus Pattern area ratio measuring apparatus

1990-05-24

1992-03-17

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356380, 356446, G01B 1128

Patent

active

050962990

ABSTRACT:
A pattern area ratio measuring apparatus includes a diffusing unit. The diffusing unit is arranged before light sources and irregularly reflects radiation light to a plate to be measured.

REFERENCES:
patent: 2720812 (1955-10-01), Middleton
patent: 3609044 (1971-09-01), Murphy
patent: 3792268 (1974-02-01), Bjerke et al.
patent: 4512662 (1985-04-01), Tobias
patent: 4681455 (1987-07-01), Jeschke et al.

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