Semiconductor device manufacturing: process – Making passive device – Planar capacitor
Reexamination Certificate
2010-08-03
2011-10-18
Sandvik, Benjamin (Department: 2826)
Semiconductor device manufacturing: process
Making passive device
Planar capacitor
C257SE21019
Reexamination Certificate
active
08039354
ABSTRACT:
Passive components are formed in the back end by using the same deposition process and materials as in the rest of the back end. Resistors are formed by connecting in series individual structures on the nth, (n+1)th, etc levels of the back end. Capacitors are formed by constructing a set of vertical capacitor plates from a plurality of levels in the back end, the plates being formed by connecting electrodes on two or more levels of the back end by vertical connection members.
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Chinthakindi Anil K.
Coolbaugh Douglas D.
Eshun Ebenezer E.
He Zhong-Xiang
Johnson Jeffrey B.
Canale Anthony J.
International Business Machines - Corporation
Sandvik Benjamin
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