Passivation oxide conversion

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357 52, 357 55, 357 61, H01L 2714, H01L 2934, H01L 2906

Patent

active

050363760

ABSTRACT:
A method of passivation of Hg.sub.1-x Cd.sub.x Te and similar semiconductors by surface oxidation (such as anodic) followed by chemical conversion of the oxide to either sulfide or selenide or a combination of both is disclosed. Preferred embodiments provide sulfide conversion by immersion of the oxide coated Hg.sub.1-x Cd.sub.x Te in a sodium sulfide solution in water with optional ethylene glycol and the selenidization by immersion in a solution of sodium selenide plus sodium hydroxide in water and ethylene glycol. Also, infrared detectors incorporating such sulfide and selenide passivated Hg.sub.1-x Cd.sub.x Te are disclosed.

REFERENCES:
patent: 3258663 (1966-06-01), Weimer
patent: 4275407 (1981-06-01), Lorenze, Jr.
patent: 4447291 (1984-05-01), Schulte
patent: 4654686 (1987-03-01), Borrello
Chin et al., "High-Performance Backside-Illuminated Hg.sub.0.78 Cd.sub.0.22 Te/CdTe(.lambda..sub.co =10 .mu.m) Planar Diodes", pp. 486 to 488, Applied Physics Letters, Sep. 1980.

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